Perfluorinated liquids (PFPE)
Fluorez perfluorinated liquids is a clear, colorless, and thermally stable perfluorinated liquid which is ideally to use as heat transfer fluids in variety of instruments. Properties of perfluorinated liquids permit its use as a direct contact single and two-phase coolant in certain semiconductor manufacturing industry and other sensitive electronics.
Working temperature of perfluorinated liquids is between -60°C to 165°C which makes it perfectly to apply in Reactive Ion Etching System, ion implanter or other test equipment.
Fluorez perfluorinated liquids has zero ozone depletion potential. The material is neither defined by the U.S. EPA, nor as a volatile organic compound (VOC). Fluorez perfluorinated liquids also contributes to zero ground-level smog formation and is environmental friendly. |
Perfluorinated liquid(PFPE) |
FL-58 |
FL-80 |
FL-98 |
FL-165 |
| MIL. STD. Tests: |
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| Gross Leak |
Ⅹ |
|
|
|
| Detector Fluids (Bombing) |
|
|
|
|
| Bubble Tank or NID |
|
Ⅹ |
|
|
| Indicator Fluids (Bubble Tank) |
|
|
|
Ⅹ |
| Thermal Shock |
|
|
|
|
| Cold Side |
|
|
Ⅹ |
|
| Hot Side |
|
|
|
Ⅹ |
| Liquid Burn In/Stress Screening |
|
|
|
Ⅹ |
| Cooling/Thermal Management |
|
|
Ⅹ |
|
| High Voltage/Dielectric Testing |
Ⅹ |
Ⅹ |
Ⅹ |
Ⅹ |
| Constant Temperature Baths |
Ⅹ |
Ⅹ |
Ⅹ |
Ⅹ |
| Product Number |
FL-58 |
FL-80 |
FL-98 |
FL-165 |
| Appearance |
Clear, colorless |
Clear, colorless |
Clear, colorless |
Clear, colorless |
| Average Molecular Weight |
338 |
388 |
430 |
650 |
| Boiling Point (1 atm) |
58 |
80 |
98 |
165 |
| Freezing Point |
<-90 |
<-95 |
<-60 |
<-57 |
| Calculated Critical Temperature |
450 K |
472 K |
543 K |
542 K |
| Calculated Critical Pressure, p |
1.83 x 106 |
1.73 x 106 |
1.18 x 106 |
1.18 x 106 |
| Liquid Density, g/cm3 |
1.68 |
1.73 |
1.77 |
1.86 |
| Latent Heat of Vaporization at boiling point, J/g |
88 |
90 |
84 |
69J |
| Kinematic Viscosity, CS |
0.38 |
0.53 |
0.8 |
2.2 |
| Absolute Viscosity, CS |
0.64 |
0.92 |
3.4 |
4.1 |
| Vapor Pressure, Pa |
30000 |
30000 |
560 |
287 |
| Specific Heat, J kg-1 °C-1 |
1100 |
1100 |
1050 |
1100 |
| Liquid Thermal Conductivity, w/cm2 |
0.00057 |
0.0006 |
0.00063 |
0.00065 |
| Coefficient of Expansion, cm3/°C |
0.0015 |
0.0015 |
0.0014 |
0.0012 |
| Surface Tension, dynes/cm |
10 |
12 |
15 |
21 |
| Refractive Index |
1.25 |
1.26 |
1.28 |
1.29 |
| Dielectric Strength, KV (2.54 mm) |
43 |
43 |
45 |
45 |
| Dielectric Constant (1KHz) |
1.86 |
1.86 |
1.86 |
1.9 |
| Dissipation Factor (1KHz) |
<0.0003 |
<0.0003 |
<0.0003 |
<0.0003 |
| Electrical Resistivity, ohm-cm |
2.0x1015 |
2.0x1015 |
2.0x1015 |
4.0x1015 |
| Water Solubility, ppm |
< 13 |
< 11 |
< 13 |
< 7 |
| Solubility in Water, ppmw |
< 41 |
< 5 |
< 41 |
< 5 |
| Ozone Depression Potential |
0 |
0 |
0 |
0 |
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